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A study on process optimization of diffusion process for realization of high voltage power devices
Kim BH  Kim DY  Lee HJ  Choi GC  Chang SM

Vol. 28, No. 3, pp. 227-231, Sep. 2022
10.7464/ksct.2022.28.3.231

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pISSN : 1598 - 9712
eISSN : 2288 - 0690

한국연구재단 등재학술지